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Guia de Soluções Industriais - Fabricação de semicondutores - DLP (deposição de laser pulsado, inglês: PLD Pulsed Laser Deposition)
As suas vantagens:
Medição de temperatura do alvo ou substrato durante a evaporação do feixe de laser (PLD)
Insensível a lasers e radiação de plasma graças ao filtro de bloqueio integrado
Medição dos menores objetos possíveis graças à óptica de alta resolução
Alinhamento exato graças ao filtro integrado câmera de vídeo ou viseira transparente
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