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インダストリアルソリューションガイド - 半導体製造 - PLD (パルスレーザーデポジション)
あなたの利点:
レーザービーム蒸着 (PLD) 中のターゲットまたは基板の温度測定
統合されたブロッキングフィルターによりレーザーやプラズマ放射の影響を受けません
高解像度光学系により可能な限り最小の物体の測定
統合された光学系により正確なアライメントビデオカメラまたはシースルーバイザー
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