Pyrometers in the semiconductor industry

The semiconductor industry is a rapidly growing market with increasing demands on the performance and production costs of its products, such as photovoltaic cells, microchips, LEDs and lasers. The process chains for manufacturing these products include the extraction of a pure semiconductor substrate with a crystal lattice that is as flawless as possible and its further processing. This further processing includes the thermal treatment and coating of wafers.

The process temperature is a decisive factor in semiconductor production. During crystal growing and wafer processing, specific temperature ranges must be adhered to in order to avoid defects and thus achieve a high yield. Real-time temperature measurement is therefore of crucial importance. Optical temperature measurement with pyrometers is the ideal method for determining the exact process temperature from the infrared radiation of the semiconductors quickly and without contact. The demanding and diverse measurement tasks require optimally coordinated pyrometer solutions.